Tetrakis(trimethylsilyl)tetrahedrane 3 has been synthesized upon irradiation of tetrakis(trimethylsilyl)cyclobutadiene 8, which can be prepared either by thermal nitrogen elimination from trimethylsilyl[1,2,3-tris(trimethylsilyl)-2-cycloprop-1-enyl]diazomethane 7 or by mild oxidation of cyclobutadiene dianion 9 with 1,2-dibromoethane. The structural characterization of tetrahedrane 3 has been achieved by X-ray crystallography. The surprising thermal stability of 3 - which is stable up to 300 degrees C - is discussed.