Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform

Opt Express. 2013 Jul 29;21(15):17814-23. doi: 10.1364/OE.21.017814.

Abstract

We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation
  • Computer-Aided Design
  • Elastic Modulus
  • Equipment Design
  • Equipment Failure Analysis
  • Light
  • Miniaturization
  • Models, Theoretical*
  • Refractometry / instrumentation*
  • Scattering, Radiation
  • Silicon / chemistry*
  • Silicon / radiation effects
  • Surface Plasmon Resonance / instrumentation*

Substances

  • Silicon