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Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing.
ACS Appl Mater Interfaces. 2020 Sep 2;12(35):39870-39880. doi: 10.1021/acsami.0c10515. Epub 2020 Aug 21.
ACS Appl Mater Interfaces. 2020.
PMID: 32805854
Functional Devices from Bottom-Up Silicon Nanowires: A Review.
Arjmand T, Legallais M, Nguyen TTT, Serre P, Vallejo-Perez M, Morisot F, Salem B, Ternon C.
Arjmand T, et al. Among authors: legallais m.
Nanomaterials (Basel). 2022 Mar 22;12(7):1043. doi: 10.3390/nano12071043.
Nanomaterials (Basel). 2022.
PMID: 35407161
Free PMC article.
Review.
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Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment.
Jayakumar G, Legallais M, Hellström PE, Mouis M, Pignot-Paintrand I, Stambouli V, Ternon C, Östling M.
Jayakumar G, et al. Among authors: legallais m.
Nanotechnology. 2019 May 3;30(18):184002. doi: 10.1088/1361-6528/aaffa5. Epub 2019 Jan 17.
Nanotechnology. 2019.
PMID: 30654356
No abstract available.
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