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Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy.
Nanomaterials (Basel). 2021 Apr 10;11(4):978. doi: 10.3390/nano11040978.
Nanomaterials (Basel). 2021.
PMID: 33920231
Free PMC article.
Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range.
Zhao MJ, Zhang JF, Huang J, Chen ZZ, Xie A, Wu WY, Huang CJ, Wuu DS, Lien SY, Zhu WZ.
Zhao MJ, et al.
Nanomaterials (Basel). 2022 Jun 10;12(12):1995. doi: 10.3390/nano12121995.
Nanomaterials (Basel). 2022.
PMID: 35745334
Free PMC article.
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