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High-resolution imaging ellipsometer.
Zhan Q, Leger JR. Zhan Q, et al. Among authors: leger jr. Appl Opt. 2002 Aug 1;41(22):4443-50. doi: 10.1364/ao.41.004443. Appl Opt. 2002. PMID: 12153069
Polarization beam shaping.
Hao B, Leger J. Hao B, et al. Appl Opt. 2007 Nov 20;46(33):8211-7. doi: 10.1364/ao.46.008211. Appl Opt. 2007. PMID: 18026561
Microellipsometer with radial symmetry.
Zhan Q, Leger JR. Zhan Q, et al. Among authors: leger jr. Appl Opt. 2002 Aug 1;41(22):4630-7. doi: 10.1364/ao.41.004630. Appl Opt. 2002. PMID: 12153096
57 results