The drive to miniaturization

Nature. 2000 Aug 31;406(6799):1023-6. doi: 10.1038/35023223.

Abstract

Following the introduction of silicon-based integrated circuitry over three decades ago, the integration density of such circuits has doubled every 12 to 18 months: this observation is known as Moore's law. For this historical trend to continue, significant challenges need to be overcome in several key technological areas. But for many of these challenges, there are at present no known solutions.