Finer features for functional microdevices

Nature. 2001 Aug 16;412(6848):697-8. doi: 10.1038/35089130.

Authors

S Kawata¹, H B Sun, T Tanaka, K Takada

Affiliation

¹ Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan. kawata@ap.eng.osaka-u.ac.jp

PMID: 11507627
DOI: 10.1038/35089130

No abstract available