Graded reflectivity micromirror arrays

Appl Opt. 2002 Jan 1;41(1):143-7. doi: 10.1364/ao.41.000143.

Abstract

A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.