The application of intensity modulated radiotherapy (IMRT) to dose escalation in the target volume sets particular demands in terms of accuracy of dose calculation. Dose calculation errors due to approximations are compensated by the optimization algorithm, a procedure that ultimately leads to incorrect fluence modulation. Such inaccuracies affect particularly the dose distribution in areas with secondary electron disequilibrium. In case tissues heterogeneity predominates, conventional dose calculation methods (such as Pencil Beam) can produce relative errors up to more than 10%. The accuracy can be significantly improved by the application of a Monte-Carlo (MC) algorithm. This paper describes a MC-based inverse treatment planning algorithm (IMCO++), based on a non-iterative approach with a feedback-controlling process. The convergence behavior of IMCO++ was investigated and the used MC dose-calculation codes MMms and XVMC were compared by means of a heterogeneous phantom. IMCO++ plans were optimized in various phantoms. All plans showed conformity in terms of dose distribution of the target volume and dose reduction in risk organs (according to the requirements of the target parameter), as well as a very fast convergence of the algorithm (in less than 10 optimization steps).