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, 300 (5623), 1269-72

Thin-film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor

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Thin-film Transistor Fabricated in Single-Crystalline Transparent Oxide Semiconductor

Kenji Nomura et al. Science.

Abstract

We report the fabrication of transparent field-effect transistors using a single-crystalline thin-film transparent oxide semiconductor, InGaO3(ZnO)5, as an electron channel and amorphous hafnium oxide as a gate insulator. The device exhibits an on-to-off current ratio of approximately 106 and a field-effect mobility of approximately 80 square centimeters per volt per second at room temperature, with operation insensitive to visible light irradiation. The result provides a step toward the realization of transparent electronics for next-generation optoelectronics.

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