A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry

G N Peggs; A Yacoot

doi:10.1098/rsta.2001.0976

A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry

Philos Trans A Math Phys Eng Sci. 2002 May 15;360(1794):953-68. doi: 10.1098/rsta.2001.0976.

Authors

G N Peggs¹, A Yacoot

Affiliation

¹ Centre for Basic, Thermal and Length Metrology, National Physical Laboratory, Queens Road, Teddington TW11 0LW, UK.

PMID: 12804288
DOI: 10.1098/rsta.2001.0976

Abstract

This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.

Publication types

Research Support, Non-U.S. Gov't
Review

MeSH terms

Interferometry / instrumentation
Interferometry / methods
Microscopy, Interference / instrumentation
Microscopy, Interference / methods*
Motion*
Nanotechnology / instrumentation
Nanotechnology / methods*
X-Ray Diffraction / instrumentation
X-Ray Diffraction / methods*