Nanometer patterning with ice

Nano Lett. 2005 Jun;5(6):1157-60. doi: 10.1021/nl050405n.

Abstract

Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.
  • Research Support, U.S. Gov't, P.H.S.

MeSH terms

  • Chromium / chemistry
  • Electrons
  • Ice*
  • Microscopy, Atomic Force
  • Microscopy, Electron, Scanning
  • Nanostructures / chemistry
  • Nanotechnology / methods*
  • Silicon / chemistry*
  • Surface Properties
  • Temperature
  • Water / chemistry

Substances

  • Ice
  • Water
  • Chromium
  • Silicon