Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings

Nano Lett. 2006 Apr;6(4):725-9. doi: 10.1021/nl0525148.

Abstract

This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures. The process is based on conventional microfabrication techniques to create a planar pattern in an InGaAs/GaAs bilayer that self-assembles into 3D structures during a wet etch release. The nanostructures are proposed to function as nanosprings for electromechanical sensors. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical characterization. The results were validated by simulation.

Publication types

  • Evaluation Study
  • Validation Study

MeSH terms

  • Arsenicals / analysis
  • Arsenicals / chemistry*
  • Computer Simulation
  • Computer-Aided Design
  • Crystallization / methods*
  • Elasticity
  • Equipment Design
  • Equipment Failure Analysis
  • Gallium / analysis
  • Gallium / chemistry*
  • Indium / analysis
  • Indium / chemistry*
  • Materials Testing
  • Models, Chemical*
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / instrumentation*
  • Nanotechnology / methods
  • Particle Size
  • Stress, Mechanical

Substances

  • Arsenicals
  • Indium
  • gallium arsenide
  • Gallium
  • indium arsenide