Abstract
We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive.
Publication types
-
Research Support, N.I.H., Extramural
-
Research Support, U.S. Gov't, Non-P.H.S.
MeSH terms
-
Chemical Phenomena
-
Chemistry
-
Crystallization / methods*
-
Dimethylpolysiloxanes / chemistry*
-
Gases
-
Hot Temperature
-
Macromolecular Substances / chemistry
-
Materials Testing
-
Microchemistry / methods*
-
Molecular Conformation
-
Nanostructures / chemistry*
-
Nanostructures / ultrastructure*
-
Nanotechnology / methods*
-
Nylons / chemistry*
-
Particle Size
-
Surface Properties
Substances
-
Dimethylpolysiloxanes
-
Gases
-
Macromolecular Substances
-
Nylons
-
poly(dimethylsiloxane)-polyamide copolymer