In this work, we developed a thin calcium degradation method introducing sensitive electrical resistance monitoring. We have demonstrated structural models of the inorganic/organic thin films to evaluate barrier properties against water and oxygen permeation. The time-dependent transmission curve of a multibarrier coated on both sides of the polyethersulfone substrate had a linear slope which was measured as 5.17 x 10(-3) gm(2) day at 20 degrees C and 60% relative humidity. This system can measure an accurate permeation rate with a high sensitivity in the measurable range of 10(1)-10(-6) gm(2) day. In addition, the test structure devised is applicable to various fabrication techniques for passivation layers with durability and ultralow permeability for flexible organic light emitting diodes.