Materials science. The cutting edge of plasma etching
Science
.
2008 Feb 22;319(5866):1050-1.
doi: 10.1126/science.1153901.
Authors
Thorsten Lill
1
,
Olivier Joubert
Affiliation
1
Applied Materials Inc., Santa Clara, CA 95054, USA. thorsten_lill@amat.com
PMID:
18292328
DOI:
10.1126/science.1153901
No abstract available