Short-wavelength MEMS-tunable VCSELs

Opt Express. 2008 Sep 29;16(20):16093-103. doi: 10.1364/oe.16.016093.

Abstract

We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm).

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electrochemistry / methods
  • Equipment Design
  • Gases*
  • Lasers*
  • Mechanics
  • Optics and Photonics*
  • Spectrum Analysis / instrumentation*
  • Spectrum Analysis / methods
  • Static Electricity
  • Surface Properties

Substances

  • Gases