STEM Imaging of 47-pm-separated Atomic Columns by a Spherical Aberration-Corrected Electron Microscope With a 300-kV Cold Field Emission Gun

J Electron Microsc (Tokyo). 2009 Dec;58(6):357-61. doi: 10.1093/jmicro/dfp030. Epub 2009 Jun 22.


A spherical aberration-corrected electron microscope has been developed recently, which is equipped with a 300-kV cold field emission gun and an objective lens of a small chromatic aberration coefficient. A dumbbell image of 47 pm spacing, corresponding to a pair of atomic columns of germanium aligned along the [114] direction, is resolved in high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) with a 0.4-eV energy spread of the electron beam. The observed image was compared with a simulated image obtained by dynamical calculation.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Microscopy, Electron, Scanning / instrumentation*
  • Microscopy, Electron, Scanning / methods*