Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator

Opt Express. 2007 Dec 10;15(25):17106-13. doi: 10.1364/oe.15.017106.


Silicon p(+)-i-n(+) diode Mach-Zehnder electrooptic modulators having an ultra-compact length of 100 to 200 mum are presented. These devices exhibit high modulation efficiency, with a V(pi)L figure of merit of 0.36 V-mm. Optical modulation at data rates up to 10 Gb/s is demonstrated with low RF power consumption of only 5 pJ/bit.