Abstract
Full metal various nanostructures with extremely smooth surface, small feature size and high aspect ratio can be fabricated by a template stripping method with EBL-patterned PMMA layer as a template. It is further demonstrated that our method is crucial to obtain clear and abundant plasmonic modes in nanocavities with metal reflectors.
Publication types
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Research Support, Non-U.S. Gov't
MeSH terms
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Luminescent Measurements
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Metal Nanoparticles / chemistry*
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Metals / chemistry*
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Microscopy, Electron, Scanning
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Nanotechnology / methods*
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Polymethyl Methacrylate / chemistry
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Silicon / chemistry
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Silver / chemistry
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Surface Properties
Substances
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Metals
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Silver
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Polymethyl Methacrylate
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Silicon