High current liquid metal ion source using porous tungsten multiemitters

M Tajmar; I Vasiljevich; W Grienauer

doi:10.1016/j.ultramic.2010.09.005

High current liquid metal ion source using porous tungsten multiemitters

Ultramicroscopy. 2010 Dec;111(1):1-4. doi: 10.1016/j.ultramic.2010.09.005. Epub 2010 Sep 22.

Authors

M Tajmar¹, I Vasiljevich, W Grienauer

Affiliation

¹ Space Propulsion & Advanced Concepts, Austrian Institute of Technology GmbH, A-2444 Seibersdorf, Austria. martin.tajmar@kaist.ac.kr

PMID: 21111260
DOI: 10.1016/j.ultramic.2010.09.005

Abstract

We recently developed an indium Liquid-Metal-Ion-Source that can emit currents from sub-μA up to several mA. It is based on a porous tungsten crown structure with 28 individual emitters, which is manufactured using Micro-Powder Injection Molding (μPIM) and electrochemical etching. The emitter combines the advantages of internal capillary feeding with excellent emission properties due to micron-size tips. Significant progress was made on the homogeneity of the emission over its current-voltage characteristic as well as on investigating its long-term stability. This LMIS seems very suitable for space propulsion as well as for micro/nano manufacturing applications with greatly increased milling/drilling speeds. This paper summarizes the latest developments on our porous multiemitters with respect to manufacturing, emission properties and long-term testing.

Publication types

Research Support, Non-U.S. Gov't