High-performance GaN metal-insulator-semiconductor ultraviolet photodetectors using gallium oxide as gate layer

Opt Express. 2011 Jun 20;19(13):12658-63. doi: 10.1364/OE.19.012658.

Abstract

In this study, gallium nitride (GaN)-based metal-insulator-semiconductor (MIS) ultraviolet (UV) photodetectors (PDs) with a gallium oxide (GaO(x)) gate layer formed by alternating current bias-assisted photoelectrochemical oxidation of n-GaN are presented. By introducing the GaO(x) gate layer to the GaN MIS UV PDs, the leakage current is reduced and a much larger UV-to-visible rejection ratio (R(UV/vis)) of spectral responsivity is achieved. In addition, a bias-dependent spectral response results in marked increase of the R(UV/vis) with bias voltage up to ~10(5). The bias-dependent responsivity suggests the possible existence of internal gain in of the GaN MIS PDs.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electronics
  • Gallium / chemistry*
  • Optical Devices*
  • Optics and Photonics / instrumentation
  • Optics and Photonics / methods*
  • Photochemical Processes
  • Semiconductors*
  • Ultraviolet Rays*

Substances

  • gallium nitride
  • gallium oxide
  • Gallium