Ultrahigh-Q nanocavities written with a nanoprobe

Nano Lett. 2011 Sep 14;11(9):3634-42. doi: 10.1021/nl201449m. Epub 2011 Aug 1.

Abstract

High-Q nanocavities have been extensively studied recently because they are considered key elements in low-power photonic devices and integrated circuits. Here we demonstrate that ultrahigh-Q (>10(6)) nanocavities can be created by employing scanning probe lithography on a prepatterned line defect in a silicon photonic crystal. This is the first realization of ultrahigh-Q nanocavities by the postprocess modification of photonic crystals. With this method, we can form an ultrahigh-Q nanocavity with controllable cavity parameters at an arbitrary position along a line defect. Furthermore, the fabricated nanocavity achieves ultralow power all-optical bistable operation owing to its large cavity enhancement effect. This demonstration indicates the possibility of realizing photonic integrated circuits on demand, where various circuit patterns are written with a nanoprobe on a universal photonic crystal substrate.

MeSH terms

  • Crystallization / methods
  • Electronics
  • Microscopy, Scanning Probe / methods
  • Nanotechnology / methods*
  • Optical Devices
  • Optics and Photonics
  • Oxides / chemistry
  • Photons
  • Refractometry / instrumentation
  • Silicon / chemistry

Substances

  • Oxides
  • Silicon