Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current

Opt Express. 2011 Dec 5;19(25):24897-904. doi: 10.1364/OE.19.024897.

Abstract

We present a compact 1.3 × 4 μm2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a best-in-class 3 dB cutoff frequency of 45 GHz, responsivity of 0.8 A/W and dark current of 3 nA. The low intrinsic capacitance of this device may enable the elimination of transimpedance amplifiers in future optical data communication receivers, creating ultra low power consumption optical communications.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Amplifiers, Electronic*
  • Equipment Design
  • Equipment Failure Analysis
  • Germanium / chemistry*
  • Optical Devices*
  • Photometry / instrumentation*
  • Radiation
  • Semiconductors*
  • Surface Plasmon Resonance / instrumentation*

Substances

  • Germanium