Optical constants of amorphous, transparent titanium-doped tungsten oxide thin films

C V Ramana; Gaurav Baghmar; Ernesto J Rubio; Manuel J Hernandez

doi:10.1021/am4006258

Optical constants of amorphous, transparent titanium-doped tungsten oxide thin films

ACS Appl Mater Interfaces. 2013 Jun 12;5(11):4659-66. doi: 10.1021/am4006258. Epub 2013 May 17.

Authors

C V Ramana¹, Gaurav Baghmar, Ernesto J Rubio, Manuel J Hernandez

Affiliation

¹ Department of Mechanical Engineering, University of Texas at El Paso, El Paso, Texas 79968, United States.

PMID: 23682744
DOI: 10.1021/am4006258

Abstract

We report on the optical constants and their dispersion profiles determined from spectroscopic ellipsometry (SE) analysis of the 20%-titanium (Ti) doped of tungsten oxide (WO3) thin films grown by sputter-deposition. The Ti-doped WO3 films grown in a wide range of temperatures (25-500 °C) are amorphous and optically transparent. SE data indicates that there is no significant interdiffusion at the film-substrate interface for a W-Ti oxide film growth of ~90 nm. The index refraction (n) at λ = 550 nm vary in the range of 2.17-2.31 with a gradual increase in growth temperature. A correlation between the growth conditions and optical constants is discussed.