Carbon coils could be synthesized using C2H2/H2 as source gases and SF6 as an incorporated additive gas under thermal chemical vapor deposition system. The surface morphologies of samples were investigated step by step during the beginning stage of the process. After finishing the substrate temperature set to 750 degrees C, the formation of circular-type nickel clusters were observed in places. By setting the total pressure to 100 Torr, most of the circular-type clusters were disappeared, whereas a few number of big-sized circular-type clusters having several micrometer-sized diameters were infrequently observed. After 0.5 minutes deposition reaction, carbon nanofilaments could be observed on a specific point of the sample. Further deposition reaction gave rise to the increase in the density of carbon nanofilaments as a form of two similar shaped carbon nanofilaments sticked together. After 10 minutes deposition reaction, the nanosized wave-like carbon coils was formed first and then the formation of the microsized carbon coils would be initiated from the nanosized wave-like carbon coils.