Note: a Piezo Tip/Tilt Platform: structure, kinematics, and experiments

Z Du; Y Su; W Yang; W Dong

doi:10.1063/1.4870062

Note: a Piezo Tip/Tilt Platform: structure, kinematics, and experiments

Rev Sci Instrum. 2014 Apr;85(4):046102. doi: 10.1063/1.4870062.

Authors

Z Du¹, Y Su¹, W Yang¹, W Dong¹

Affiliation

¹ State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150080, China.

PMID: 24784680
DOI: 10.1063/1.4870062

Abstract

A Piezo Tip/Tilt Platform (PT(2)P) is presented with its structure, kinematics, and preliminary experiments. Two essential models of the presented PT(2)P, an equivalent hinge of the flexure hinge and a simplified model of the transmission mechanism, are discussed with the analysis on the structure of the PT(2)P. Based on these models, the inverse kinematics of the PT(2)P is derived. Two experiments are conducted on a prototype of the PT(2)P. The kinematic model is verified with experimental results, which also indicate that the resolution and the repeatability of the PT(2)P is, respectively, better than 0.50 μrad and 0.25 μrad.