Element specific monolayer depth profiling

Abstract

The electronic phase behavior and functionality of interfaces and surfaces in complex materials are strongly correlated to chemical composition profiles, stoichiometry and intermixing. Here a novel analysis scheme for resonant X-ray reflectivity maps is introduced to determine such profiles, which is element specific and non-destructive, and which exhibits atomic-layer resolution and a probing depth of hundreds of nanometers.

Keywords: complex functional materials; depth profiling; non-destructive characterization; resonant X-ray reflectivity; thin film heterostructures.