The present paper adopts permanent scatterer interferometric synthetic aperture radar(PS-InSAR) technique to obtain land subsidence information in Beijing plain area. Then, combined with the time series of meteorological data, groundwater dynamic monitoring data, interferometric data and geological structure data, the formation and evolution mechanism of land subsidence were revealed. The results show that (1) Beijing regional land subsidence characteristics are obvious, more land subsidence funnel areas are interconnected, the settlement is influenced by rainfall recharge and exhibits seasonal fluctuation characteristics; (2) The land subsidence center and groundwater drawdown funnel centre are not fully consistent, unconfined aquifer and shallow confined aquifer are the major contribution factors and have greater impact on the land subsidence; (3) Land subsidence mainly occurred in the clay layer with a thickness of 50-70 m; (4) Land subsidence caused by tectonic controls is significant and the deformation gradient is great on both sides of the fault.