High-resolution, high-throughput imaging with a multibeam scanning electron microscope

J Microsc. 2015 Aug;259(2):114-120. doi: 10.1111/jmi.12224. Epub 2015 Jan 27.


Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.

Keywords: High-throughput imaging; multibeam; parallel data acquisition; scanning electron microscopy.

MeSH terms

  • Animals
  • Brain / ultrastructure
  • Electrons
  • Mice
  • Microscopy, Electron, Scanning / instrumentation*
  • Microscopy, Electron, Scanning / methods*
  • Semiconductors