Intensity distribution analysis of cathodoluminescence using the energy loss distribution of electrons

Masahiro Fukuta; Wataru Inami; Atsushi Ono; Yoshimasa Kawata

doi:10.1016/j.ultramic.2015.10.024

Intensity distribution analysis of cathodoluminescence using the energy loss distribution of electrons

Ultramicroscopy. 2016 Jan:160:225-229. doi: 10.1016/j.ultramic.2015.10.024. Epub 2015 Nov 2.

Authors

Masahiro Fukuta¹, Wataru Inami², Atsushi Ono², Yoshimasa Kawata³

Affiliations

¹ Graduate School of Science and Technology, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 432-8011, Japan.
² Research Institute of Electronics, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 432-8011, Japan; CREST, Japan Science and Technology Agency, 4-1-8, Honmachi, Kawaguchi, Saitama 332-0012, Japan.
³ Research Institute of Electronics, Shizuoka University, 3-5-1, Johoku, Naka, Hamamatsu 432-8011, Japan; CREST, Japan Science and Technology Agency, 4-1-8, Honmachi, Kawaguchi, Saitama 332-0012, Japan. Electronic address: kawata@eng.shizuoka.ac.jp.

PMID: 26550930
DOI: 10.1016/j.ultramic.2015.10.024

Abstract

We present an intensity distribution analysis of cathodoluminescence (CL) excited with a focused electron beam in a luminescent thin film. The energy loss distribution is applied to the developed analysis method in order to determine the arrangement of the dipole locations along the path of the electron traveling in the film. Propagating light emitted from each dipole is analyzed with the finite-difference time-domain (FDTD) method. CL distribution near the film surface is evaluated as a nanometric light source. It is found that a light source with 30 nm widths is generated in the film by the focused electron beam. We also discuss the accuracy of the developed analysis method by comparison with experimental results. The analysis results are brought into good agreement with the experimental results by introducing the energy loss distribution.

Keywords: Cathodoluminescence; Finite-difference time-domain method; Monte Carlo simulation; Nanometric light spot.