Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing

Opt Express. 2016 Jan 25;24(2):1386-91. doi: 10.1364/OE.24.001386.

Abstract

We report on the fabrication and characterization of ridge waveguides in lithium niobate thin films by diamond blade dicing. The lithium niobate thin films with a thickness of 1 µm were fabricated by bonding a He-implanted lithium niobate wafer to a SiO(2)-coated lithium niobate wafer and crystal ion slicing. Propagation losses of 1.2 dB/cm for TE and 2.8 dB/cm for TM polarization were measured at 1550 nm for a 9.28 mm long and 2.1 µm wide waveguide using the Fabry-Perot method.

Publication types

  • Research Support, Non-U.S. Gov't