Intrinsically Stretchable Biphasic (Solid-Liquid) Thin Metal Films

Adv Mater. 2016 Jun;28(22):4507-12. doi: 10.1002/adma.201506234. Epub 2016 Feb 29.

Abstract

Stretchable biphasic conductors are formed by physical vapor deposition of gallium onto an alloying metal film. The properties of the photolithography-compatible thin metal films are highlighted by low sheet resistance (0.5 Ω sq(-1) ) and large stretchability (400%). This novel approach to deposit and pattern liquid metals enables extremely robust, multilayer and soft circuits, sensors, and actuators.

Keywords: elasticity; elastomers; electrical conductivity; liquid metals; thin metal films.