A novel substrate for multisensor hyperspectral imaging

Abstract

The quality of chemical imaging, especially multisensor hyperspectral imaging, strongly depends on sample preparation techniques and instrumental infrastructure but also on the choice of an appropriate imaging substrate. To optimize the combined imaging of Raman microspectroscopy, scanning-electron microscopy and energy-dispersive X-ray spectroscopy, a novel substrate was developed based on sputtering of highly purified aluminium onto classical microscope slides. The novel aluminium substrate overcomes several disadvantages of classical substrates like impurities of the substrate material and contamination of the surface as well as surface roughness and homogeneity. Therefore, it provides excellent conditions for various hyperspectral imaging techniques and enables high-quality multisensor hyperspectral chemical imaging at submicron lateral resolutions.

Keywords: Electron microscopy; Raman microspectroscopy; energy dispersive X-ray spectroscopy; imaging substrate; multisensor hyperspectral imaging.