The properties and synthesis procedures of the nanometrically thin pyrolyzed photoresist films (PPF) and the pyrolytic carbon films (PCF) were compared, and a number of similarities were found. Closer examination showed that the optical properties of these films are almost identical; however, the DC resistance of PPF is about three times higher than that of PCF. Moreover, we observed that the wettability of amorphous PPF and PCF was almost comparable to crystalline graphite. Potential applications executed by utilizing the small difference in the synthesis procedure of these two materials are suggested.
Keywords: Chemical vapor deposition; Nanographite film; Pyrolytic carbon; Pyrolyzed photoresist.