The Effect of Sensor Dimensions on the Performance of Flexible Hot Film Shear Stress Sensors

Micromachines (Basel). 2019 May 6;10(5):305. doi: 10.3390/mi10050305.


This paper presents a study to determine the effect of sensor dimensions (length, width, and thickness) on the performance of flexible hot film shear stress sensors. The sensing component of a hot film sensor is nickel thermistor, and the flexible substrate material is polyimide. Several groups of flexible hot film shear stress sensors with different lengths, widths, and thicknesses were studied. The temperature coefficient of resistance (TCR) was measured. The TCR increased slightly with increasing thickness. The frequency response (time constant) of the flexible hot film shear stress sensor was obtained by the square wave, while the sensitivity was tested in a wind tunnel. The study found that as the sensor length was shortened, the frequency response increased, and the sensitivity decreased.

Keywords: flexible substrate; hot film sensor; nickel thermistor; sensitivity; temperature coefficient of resistance (TCR); time constant.