Silicon-Based Sensors for Biomedical Applications: A Review

Sensors (Basel). 2019 Jul 1;19(13):2908. doi: 10.3390/s19132908.


The paper highlights some of the significant works done in the field of medical and biomedical sensing using silicon-based technology. The use of silicon sensors is one of the pivotal and prolonged techniques employed in a range of healthcare, industrial and environmental applications by virtue of its distinct advantages over other counterparts in Microelectromechanical systems (MEMS) technology. Among them, the sensors for biomedical applications are one of the most significant ones, which not only assist in improving the quality of human life but also help in the field of microfabrication by imparting knowledge about how to develop enhanced multifunctional sensing prototypes. The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. The electrical conductivity and the mechanical flexibility of silicon vary to a large extent depending on its use in developing prototypes. The article also explains some of the bottlenecks that need to be dealt with in the current scenario, along with some possible remedies. Finally, a brief market survey is given to estimate a probable increase in the usage of silicon in developing a variety of biomedical prototypes in the upcoming years.

Keywords: biomedical; nanowire; semiconducting; sensors; silicon.

Publication types

  • Review

MeSH terms

  • Biomedical Research / methods
  • Biosensing Techniques*
  • Electrodes
  • Humans
  • Microtechnology
  • Nanowires / chemistry*
  • Silicon / chemistry*


  • Silicon