Conformal smoothing of mid-spatial frequency surface error for nano-accuracy Continuous Phase Plates (CPP)

Ci Song; Wanli Zhang; Feng Shi; Zhifan Lin; Xuqing Nie

doi:10.1038/s41598-020-59484-4

Conformal smoothing of mid-spatial frequency surface error for nano-accuracy Continuous Phase Plates (CPP)

Sci Rep. 2020 Feb 13;10(1):2579. doi: 10.1038/s41598-020-59484-4.

Authors

Ci Song^{1

2

3}, Wanli Zhang^{4

5

6}, Feng Shi^{1

2

3}, Zhifan Lin^{1

2

3}, Xuqing Nie^{1

2

3}

Affiliations

¹ College of Intelligent Science and Technology, National University of Defense Technology, Changsha, 410073, China.
² Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha, 410073, China.
³ Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha, 410073, China.
⁴ College of Intelligent Science and Technology, National University of Defense Technology, Changsha, 410073, China. 564841540@qq.com.
⁵ Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha, 410073, China. 564841540@qq.com.
⁶ Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha, 410073, China. 564841540@qq.com.

Abstract

This paper presented a conformal smoothing theory, and smoothing capability evaluation was established on the proposed theory. According to pressure distribution model, processing parameters have been optimized and the CPP sample with a size of 340 × 340 mm was applied in conformal smoothing. The middle spatial frequency was effectively corrected with the total polishing time of 750 min, and energy was constringed 32.2 times (improved from 57.68 nm²·mm to 1.79 nm²·mm). Meanwhile, surface roughness RMS (root mean square) maintained at the same scale (changed from 265.4 nm to 265.2 nm). Parametric conformal smoothing was proven to be an effective method to control the middle spatial frequency error of CPPs.