Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source

Y G Liu; J L Liu; Q Wu; L T Sun

doi:10.1063/1.5128393

Ion beam production with an antenna type 2.45 GHz electron cyclotron resonance ion source

Rev Sci Instrum. 2020 Feb 1;91(2):023301. doi: 10.1063/1.5128393.

Authors

Y G Liu¹, J L Liu¹, Q Wu¹, L T Sun¹

Affiliation

¹ Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China.

PMID: 32113396
DOI: 10.1063/1.5128393

Abstract

A very compact permanent magnet 2.45 GHz electron cyclotron resonance ion source has been designed and developed for various purposes. The microwave power is coupled into the plasma chamber using the coaxial antenna instead of the waveguide, the magnetic field is produced by two NdFeB permanent magnet rings, and the diameter of the source body is only 10 cm. The beam current under different conditions was measured. A maximum of 5.8 mA H⁺/H₂ ⁺/H₃ ⁺ mixed beam could be extracted from a 5.5 mm diameter extraction aperture.