Two diffractive optical elements are used to create a compact raster THz scanning setup in reflective configuration. The first one focuses the radiation into the small focal spot on the sample, while the second one collects reflected radiation and focuses it on the detector. To assure small size of the setup and large apertures of optical elements, structures work in the off-axis geometry. Thus, the focal spot is formed 100 mm after and 60 mm below the optical axis of the element, which measures 75 mm in diameter. The designed iterative algorithm allows further minimization of these values.