Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

Sensors (Basel). 2020 Apr 14;20(8):2206. doi: 10.3390/s20082206.


This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

Keywords: biosensors; laser micromachining; lithium niobate; medical devices; sensors.

MeSH terms

  • Biosensing Techniques / instrumentation
  • Biosensing Techniques / methods*
  • Lasers
  • Microscopy, Electron, Scanning
  • Microtechnology*
  • Niobium / chemistry*
  • Oxides / chemistry*


  • Oxides
  • Niobium
  • lithium niobate