Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing

Micromachines (Basel). 2021 Jul 28;12(8):893. doi: 10.3390/mi12080893.


Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...].

Publication types

  • Editorial