Spectrum imaging measurements with semi-parallel detection using an AES apparatus

Noboru Taguchi; Tatsuya Uchida; Konomi Ikita; Akihiro Tanaka; Nobuyuki Ikeo; Kazushiro Yokouchi; Kenichi Tsutsumi

doi:10.1016/j.ultramic.2021.113450

Spectrum imaging measurements with semi-parallel detection using an AES apparatus

Ultramicroscopy. 2022 Mar:233:113450. doi: 10.1016/j.ultramic.2021.113450. Epub 2021 Dec 7.

Authors

Noboru Taguchi¹, Tatsuya Uchida², Konomi Ikita², Akihiro Tanaka², Nobuyuki Ikeo², Kazushiro Yokouchi², Kenichi Tsutsumi²

Affiliations

¹ Research Institute of Electrochemical Energy, Department of Energy and Environment, National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan. Electronic address: n-taguchi@aist.go.jp.
² JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.

PMID: 34929559
DOI: 10.1016/j.ultramic.2021.113450

Abstract

We have developed a method to obtain a data cube using a semi-parallel detection scheme and an electrostatic hemispherical analyzer (HSA) with multi-channel detection. By improving the Auger intensity map measurement scheme, the number of detector energy sweeps is reduced, and faster measurement is achieved. The gain differences among the detection channel are corrected by post-processing, and a data cube of Auger electron spectra is constructed. A data cube was obtained for an example of a sample with a non-flat surface, lead-free solder. It was demonstrated to be possible to extract spectra from any position within the measurement area and create the elemental distribution maps.

Keywords: Auger; Data cube; HSA; Parallel detection; SEM.