A novel copper-catalyzed cyclization of α-fluoroalkyl-α-diazoketones with (thio)amides has been developed. This mechanistically distinct protocol provides a robust and straightforward approach to construct 5-fluoroalkylated trisubstituted oxazoles and thiazoles with high efficiency and excellent functional group compatibility. Experimental studies suggest a mechanism involving imidate ligand migratory insertion of a copper carbenoid as the key step.