Nanostructured tungsten oxide as a semiconductor metal oxide has attracted considerable attention due to its promising and notable properties. Tungsten oxide nanoparticles can be used in a wide range of technology and applications such as catalysts, sensors, supercapacitors, etc. In this study, nanoparticles were prepared via a simple method using an atmospheric glow discharge. This modern approach had many advantages such as high efficiency and straightforward function. Synthesis performance was done in only one step and a short time which started at 2 min and had been continued for 8 min. The X-ray diffraction pattern revealed the formation [Formula: see text] at atmospheric pressure. The synthesized particle size was characterized using scanning electron microscopy. According to the experimental results, the synthesis was greatly influenced by the applied voltage, gas type, and plasma forming side over the water surface. Increases in electrical potential difference and thermal conductivity of the gas led to a greater rate of synthesis, while this rate was reduced by decreasing the atomic weight of the gas.
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