Advances in Silicon-Based Integrated Lidar

Sensors (Basel). 2023 Jun 26;23(13):5920. doi: 10.3390/s23135920.


Silicon-based Lidar is an ideal way to reduce the volume of the Lidar and realize monolithic integration. It removes the moving parts in the conventional device and realizes solid-state beam steering. The advantages of low cost, small size, and high beam steering speed have attracted the attention of many researchers. In order to facilitate researchers to quickly understand the research progress and direction, this paper mainly describes the research progress of silicon-based integrated Lidar, including silicon-based optical phased array Lidar, silicon-based optical switch array Lidar, and continuous frequency-modulated wave Lidar. In addition, we also introduced the scanning modes and working principles of other kinds of Lidar, such as the Micro-Electro-Mechanical System, mechanical Lidar, etc., and analyzed the characteristics of the Lidars above. Finally, we summarized this paper and put forward the future expectations of silicon-based integrated Lidar.

Keywords: FMCW; OPA Lidar; ToF; optical switch Lidar; silicon-based Lidar.

Publication types

  • Review

MeSH terms

  • Humans
  • Micro-Electrical-Mechanical Systems*
  • Records
  • Research Personnel
  • Silicon*


  • Silicon