In this work, a microwave resonator sensor with a unique configuration consisting of three resonators and two feedlines is proposed. This novel design aims to improve the performance and functionality of microwave resonator sensors for various applications. The frequency response of the sensor to materials with different dielectric constants is simulated. The results show that the most sensitive region of the sensor is located on the first interdigital structure, and placing the materials in other regions would enhance the linear correlation of its frequency response. The sensor also exhibits the ability to distinguish whether the same material has defects and the ability to qualitatively detect subtle changes in dielectric constant. Finally, the proposed sensor is fabricated and measured under the condition consistent with the simulation environment. The measured results are basically consistent with the simulation results, which confirms the potential of this sensor in detecting dielectric constants and resolving materials with defects, and the response of the sensor to the materials under test demonstrates its potential in measuring different thicknesses and loss tangents.
Keywords: cross-finger structure; dielectric sensor; differential structure; microwave sensor.