The charge state of noble metal atoms on a semiconductor surface is an important factor in surface catalysis. In this study, Au atoms were deposited on the rutile TiO2(110) surface to characterize its charge properties using atomic force microscopy with Kelvin probe force microscopy at 78 K. Au single atoms, dimers, and trimers at different sites on the surface were investigated. Positively charged Au atoms were verified at oxygen sites, while negatively charged Au atoms were found near oxygen vacancy sites. Furthermore, the charge states of small Au nanoclusters were clarified. Understanding the charge states of Au atoms is significant for identifying their efficient catalytic effects in surface catalysis.