Design and fabrication of a LEG based stretchable piezoresistive acoustic pressure sensor for ultra low pressures

Mosayeb Shiri; Nowrouz Mohammad Nouri; Mohammad Riahi

doi:10.1038/s41598-025-97091-3

Design and fabrication of a LEG based stretchable piezoresistive acoustic pressure sensor for ultra low pressures

Sci Rep. 2025 Apr 21;15(1):13775. doi: 10.1038/s41598-025-97091-3.

Authors

Mosayeb Shiri¹, Nowrouz Mohammad Nouri², Mohammad Riahi¹

Affiliations

¹ School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran.
² School of Mechanical Engineering, Iran University of Science and Technology, Tehran, Iran. mnouri@iust.ac.ir.

Abstract

The development of an acoustic pressure sensor capable of detecting ultra-low-amplitude signals has been a crucial focus in marine, environmental, and military communication applications. This study presents the design, fabrication, and characterization of a stretchable piezoresistive acoustic pressure sensor utilizing laser-engraved graphene (LEG) technology. The sensor features a graphene-based composite sensing element encapsulated between two PDMS layers, specifically designed to operate in the ultra-low-pressure range (< 3 Pa). A calibration system based on a syringe pump was developed to evaluate the sensor's performance. Experimental results demonstrated a sensitivity of 61.00 mV/V/kPa with a maximum nonlinearity error of 0.8% FSS. Additionally, dynamic pressure measurements confirmed the sensor's capability to detect cyclic acoustic pressure variations, exhibiting a stable and repeatable response. These findings validate the feasibility of LEG-based flexible pressure sensors for detecting low-amplitude acoustic signals, offering promising potential for high-sensitivity applications in underwater noise detection, biomedical sensing, and environmental monitoring.

Keywords: Acoustic; Differential pressure sensor; LEG; Piezoresistive; Sensor fabrication; Stretchable sensor.