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, 197 (4300), 259-60

High-resolution Soft X-Ray Microscopy

High-resolution Soft X-Ray Microscopy

R Feder et al. Science.

Abstract

X-ray micrographs of biological materials have been obtained with a resolution better than 100 angstroms by using x-ray resist as the recording medium. A high-resolution scanning electron microscope with a short-focal-length final lens, operating in the "low-loss" mode, is used to make the smallest features in the x-ray replica visible.

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